IEC 63068-1 Ed. 1.0 en:2019

IEC 63068-1 Ed. 1.0 en:2019

Click here to purchase
IEC 63068-1:2019(E) gives a classification of defects in as-grown 4H-SiC (Silicon Carbide) epitaxial layers. The defects are classified on the basis of their crystallographic structures and recognized by non-destructive detection methods including bright-field OM (optical microscopy), PL (photoluminescence), and XRT (X-ray topography) images.

Product Details

Edition:
1.0
Published:
01/30/2019
Number of Pages:
23
File Size:
1 file , 5.6 MB